DocumentCode
2522401
Title
Surface Layer of a Polished Crystal Plate
Author
Fukuyo, Hitohiro ; Oura, Nobunori
fYear
1976
fDate
1976
Firstpage
254
Lastpage
258
Keywords
Annealing; Distortion measurement; Electrodes; Ellipsometry; Etching; Frequency measurement; Geometry; Refractive index; Resonance; Resonant frequency;
fLanguage
English
Publisher
ieee
Conference_Titel
30th Annual Symposium on Frequency Control. 1976
Type
conf
DOI
10.1109/FREQ.1976.201322
Filename
1540312
Link To Document