DocumentCode
2522671
Title
Development of a microspectrometer for the infrared range
Author
Otto, T. ; Saupe, R. ; Bruch, R. ; Gessner, T.
Author_Institution
Fraunhofer Inst. for Reliability & Microintegration, Germany
fYear
2002
fDate
26-26 Sept. 2002
Firstpage
31
Lastpage
32
Abstract
In this paper we demonstrate the development of a new microspectrometer system for the mid-infrared range (2.5 - 6 /spl mu/m). Micromechanical components are used for the system, therefore a very compact and economical spectroscopic device has been realized. First measurement results are reported as well as the functional ability of the device.
Keywords
infrared spectrometers; micro-optics; 2.5 to 6 micron; compact device; micromechanical components; microspectrometer system; mid infrared range; mid-IR range; Biomedical measurements; Biomedical optical imaging; Gratings; Infrared spectra; Light sources; Manufacturing; Mirrors; Optical design; Radiation detectors; Spectroscopy;
fLanguage
English
Publisher
ieee
Conference_Titel
Infrared and Millimeter Waves, 2002. Conference Digest. Twenty Seventh International Conference on
Conference_Location
San Diego, CA, USA
Print_ISBN
0-7803-7423-1
Type
conf
DOI
10.1109/ICIMW.2002.1076069
Filename
1076069
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