Title :
Aging Effects in Plasma Etched SAW Resonators
Author :
Bell, O.T. ; Miller, S.P.
Keywords :
Aging; Etching; Oscillators; Plasma applications; Plasma devices; Plasma stability; Plasma temperature; Plasma waves; Surface acoustic wave devices; Surface acoustic waves;
Conference_Titel :
30th Annual Symposium on Frequency Control. 1976
DOI :
10.1109/FREQ.1976.201338