DocumentCode :
2522701
Title :
Aging Effects in Plasma Etched SAW Resonators
Author :
Bell, O.T. ; Miller, S.P.
fYear :
1976
fDate :
1976
Firstpage :
358
Lastpage :
362
Keywords :
Aging; Etching; Oscillators; Plasma applications; Plasma devices; Plasma stability; Plasma temperature; Plasma waves; Surface acoustic wave devices; Surface acoustic waves;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
30th Annual Symposium on Frequency Control. 1976
Type :
conf
DOI :
10.1109/FREQ.1976.201338
Filename :
1540328
Link To Document :
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