Title :
Measurement of optical constants of CVD-diamond for short-wavelength far-infrared region
Author :
Nakayama, K. ; Tazawa, H. ; Okajima, S. ; Kawahata, K. ; Tanaka, K. ; Tokuzawa, T. ; Ito, Y.
Author_Institution :
Coll. of Eng., Chubu Univ., Aichi, Japan
Abstract :
We are developing a diagnostic system using short-wavelength far-infrared lasers (40-70 /spl mu/m in wavelength) for high density and large volume plasmas. In the wavelength region, a CVD-diamond is the excellent materials for optical windows of the laser and the plasma vessel and beam splitters of a multi-channel interferometer. Using our FIR laser system, the optical constants (refractive index n, absorption coefficient /spl alpha/ and transmissivity T) of the diamond etalon have been measured precisely for 47-, 57- and 71-/spl mu/m in wavelength. The result for 57.1511 /spl mu/m light is n=2.383(0)/spl plusmn/0.001, /spl alpha/=0.32/spl plusmn/0.02 cm/sup -1/ and T=96/spl plusmn/1% (at 1.023 mm in thickness).
Keywords :
CVD coatings; absorption coefficients; diamond; light interferometry; light transmission; optical materials; optical windows; plasma density; plasma diagnostics; plasma light propagation; refractive index; submillimetre wave lasers; 1.023 mm; 40 to 71 micron; C; CVD-diamond; FIR laser system; absorption coefficient; beam splitters; diagnostic system; diamond etalon; high density large volume plasmas; multichannel interferometer; optical constants; optical windows; plasma vessel; refractive index; short-wavelength far-infrared region; transmissivity; Optical interferometry; Optical materials; Optical refraction; Optical variables control; Plasma density; Plasma diagnostics; Plasma materials processing; Plasma measurements; Plasma waves; Wavelength measurement;
Conference_Titel :
Infrared and Millimeter Waves, 2002. Conference Digest. Twenty Seventh International Conference on
Conference_Location :
San Diego, CA, USA
Print_ISBN :
0-7803-7423-1
DOI :
10.1109/ICIMW.2002.1076135
