Title :
Broadband NbTiN based SIS mixers for HIFI Band 2
Author :
Glenz, S. ; Justen, M. ; Putz, Patrick ; Teipen, R. ; Tils, T. ; Honingh, C.E. ; Jacobs, K.
Author_Institution :
KOSMA, Koln Univ., Germany
Abstract :
We present SIS waveguide mixer results in the frequency range 638-802 GHz at an IF frequency of 4-8 GHz. We use Nb/Al/sub 2/O/sub 3//Nb junctions with areas down to 0.6 /spl mu/m/sup 2/ defined by e-beam lithography and chemical mechanical polishing (CMP), embedded in low loss NbTiN/SiO/sub 2//Nb or NbTiN/SiO/sub 2//Al microstrip tuning circuits.
Keywords :
artificial satellites; chemical mechanical polishing; circuit tuning; electron beam lithography; microstrip circuits; niobium compounds; semiconductor materials; semiconductor-insulator-semiconductor devices; space vehicle electronics; submillimetre wave mixers; titanium compounds; 110 to 130 K; 4 to 8 GHz; 638 to 802 GHz; CMP; Herschel Satellite HIFI band 2 applications; Nb-Al/sub 2/O/sub 3/; NbTiN-SiO/sub 2/-Al; NbTiN-SiO/sub 2/-Nb; NbTiN-based broadband SIS waveguide mixers; NbTiN/SiO/sub 2//Al microstrip tuning circuits; NbTiN/SiO/sub 2//Nb microstrip tuning circuits; chemical mechanical polishing; e-beam lithography; embedded Nb/Al/sub 2/O/sub 3//Nb junction areas; mixer IF frequency; mixer frequency range; semiconductor-insulator-semiconductor structures; submm-wave mixers; Bandwidth; Circuit optimization; Delta modulation; Extraterrestrial measurements; Frequency; Health information management; Microstrip; Niobium; Temperature; Tuning;
Conference_Titel :
Infrared and Millimeter Waves, 2002. Conference Digest. Twenty Seventh International Conference on
Conference_Location :
San Diego, CA, USA
Print_ISBN :
0-7803-7423-1
DOI :
10.1109/ICIMW.2002.1076182
