Title :
Ultra low cost single-step fabrication of double-sided YBa2Cu3O7-δ films by the non-vacuum MOD method for microwave circuits
Author :
Sanada, Atsushi ; Kimura, Masao ; Awai, Ikuo
Author_Institution :
Yamaguchi Univ., Japan
Abstract :
Low-cost, single-step fabrication of double-sided YBa2CU3O7-δ (YBCO) high-temperature superconducting (HTS) films on a [001]LaAlO3 substrate for microwave applications are demonstrated by the metalorganic deposition (MOD) method, which is a liquid-phase non-vacuum fabrication process. High quality HTS films with the critical temperature (Tc) of 90.4 K and the surface impedance Rs of less than 0.1 mΩ at 42 K and 9.99 GHz is achieved. X-ray diffraction (XRD) pattern and scanning electron microscope (SEM) observation are also carried out and the epitaxial growth of c-axis oriented YBCO crystals is confirmed. The measured unloaded quality factor (Qu) of 2.68×104 is achieved for a half-wavelength microstrip resonator fabricated on the YBCO film at 30 K and 2.511 GHz.
Keywords :
Q-factor; X-ray diffraction; barium compounds; high-temperature superconductors; liquid phase epitaxial growth; microstrip circuits; microstrip resonators; microwave circuits; scanning electron microscopy; superconducting epitaxial layers; superconducting transition temperature; surface impedance; yttrium compounds; 2.511 GHz; 30 K; 42 K; 9.99 GHz; HTS thin films; LaAlO3; Q-factor; SEM; X-ray diffraction; XRD; YBCO thin film fabrication; YBa2Cu3O7-δ; YBa2Cu3O7-δ thin film fabrication; [001]LaAlO3 substrate; epitaxial growth; half wavelength microstrip resonator; high-temperature superconducting films; liquid phase nonvacuum metalorganic deposition method; microwave application; microwave circuits; quality factor; scanning electron microscopy; surface impedance; Costs; Fabrication; High temperature superconductors; Microwave theory and techniques; Scanning electron microscopy; Substrates; Superconducting epitaxial layers; Superconducting films; Superconducting microwave devices; Yttrium barium copper oxide;
Conference_Titel :
Microwave Conference, 2003. 33rd European
Print_ISBN :
1-58053-834-7
DOI :
10.1109/EUMC.2003.177725
