• DocumentCode
    2524906
  • Title

    Ultra low cost single-step fabrication of double-sided YBa2Cu3O7-δ films by the non-vacuum MOD method for microwave circuits

  • Author

    Sanada, Atsushi ; Kimura, Masao ; Awai, Ikuo

  • Author_Institution
    Yamaguchi Univ., Japan
  • Volume
    3
  • fYear
    2003
  • fDate
    7-9 Oct. 2003
  • Firstpage
    1299
  • Abstract
    Low-cost, single-step fabrication of double-sided YBa2CU3O7-δ (YBCO) high-temperature superconducting (HTS) films on a [001]LaAlO3 substrate for microwave applications are demonstrated by the metalorganic deposition (MOD) method, which is a liquid-phase non-vacuum fabrication process. High quality HTS films with the critical temperature (Tc) of 90.4 K and the surface impedance Rs of less than 0.1 mΩ at 42 K and 9.99 GHz is achieved. X-ray diffraction (XRD) pattern and scanning electron microscope (SEM) observation are also carried out and the epitaxial growth of c-axis oriented YBCO crystals is confirmed. The measured unloaded quality factor (Qu) of 2.68×104 is achieved for a half-wavelength microstrip resonator fabricated on the YBCO film at 30 K and 2.511 GHz.
  • Keywords
    Q-factor; X-ray diffraction; barium compounds; high-temperature superconductors; liquid phase epitaxial growth; microstrip circuits; microstrip resonators; microwave circuits; scanning electron microscopy; superconducting epitaxial layers; superconducting transition temperature; surface impedance; yttrium compounds; 2.511 GHz; 30 K; 42 K; 9.99 GHz; HTS thin films; LaAlO3; Q-factor; SEM; X-ray diffraction; XRD; YBCO thin film fabrication; YBa2Cu3O7-δ; YBa2Cu3O7-δ thin film fabrication; [001]LaAlO3 substrate; epitaxial growth; half wavelength microstrip resonator; high-temperature superconducting films; liquid phase nonvacuum metalorganic deposition method; microwave application; microwave circuits; quality factor; scanning electron microscopy; surface impedance; Costs; Fabrication; High temperature superconductors; Microwave theory and techniques; Scanning electron microscopy; Substrates; Superconducting epitaxial layers; Superconducting films; Superconducting microwave devices; Yttrium barium copper oxide;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Microwave Conference, 2003. 33rd European
  • Print_ISBN
    1-58053-834-7
  • Type

    conf

  • DOI
    10.1109/EUMC.2003.177725
  • Filename
    1262896
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=2524906