Microelectromechanical systems (MEMS) tutorial

Using the fabrication techniques and materials of microelectronics as a basis, MEMS processes construct both mechanical and electrical components. Mechanical components in MEMS, like transistors in microelectronics, have dimensions that are measured in microns and numbers measured from a few to millions. MEMS is not about any one single application or device, nor is it defined by a single fabrication process or limited to a few materials. More than anything else, MEMS is a fabrication approach that conveys the advantages of miniaturization, multiple components and microelectronics to the design and construction of integrated electromechanical systems. MEMS devices have applications in areas ranging from automobiles and telecom switching to printers and inertial guidance systems. While MEMS devices will be a relatively small fraction of the cost, size and weight of these systems, MEMS will be critical to their operation, reliability and affordability. MEMS devices, and the smart products they enable, will increasingly be the performance differentiator for a wide variety of commercial products