A MEMS microphone interface with force-balancing and charge-control

Author

Jawed, S.A. ; Cattin, D. ; Massari, N. ; Gottardi, M. ; Baschirotto, A.

Author_Institution

IRST, Fondazione Bruno Kessler, Trento

fYear

2008

fDate

June 22 2008-April 25 2008

Firstpage

97

Lastpage

100

Abstract

This paper presents a low-power CMOS interface for a MEMS capacitive sensor. The interface has embedded force-balancing capability which improves the linearity of the readout for higher sound pressures. The interface also features a bias-charge control functionality to enhance the sensitivity of the microphone. The interface employs boot-strapped preamplifier for active parasitic capacitance compensation, followed by a 3rd-order sigma-delta modulator. The interface is designed in 0.35um CMOS technology and its brief simulation results in Cadence-Spectre are presented.

Keywords

CMOS integrated circuits; capacitive sensors; microphones; microsensors; preamplifiers; sigma-delta modulation; 3rd-order sigma-delta modulator; CMOS; Cadence-Spectre; MEMS; active parasitic capacitance; bias-charge control functionality; boot-strapped preamplifier; capacitive sensor; force-balancing capability; microphone; size 0.35 mum; Acoustic sensors; Capacitive sensors; Electrochemical machining; Electrodes; Linearity; Mechanical sensors; Micromechanical devices; Microphones; Parasitic capacitance; Silicon;

fLanguage

English

Publisher

ieee

Conference_Titel

Research in Microelectronics and Electronics, 2008. PRIME 2008. Ph.D.

Conference_Location

Istanbul

Print_ISBN

978-1-4244-1983-8

Electronic_ISBN

978-1-4244-1984-5

Type

conf

DOI

10.1109/RME.2008.4595734

Filename

4595734