Title :
MOEMS thermal imaging camera
Author :
Toy, M. Fatih ; Ferhanoglu, Onur ; Torun, Hamdi ; Degertekin, F. Levent ; Urey, Hakan
Author_Institution :
Dept. of Electr. Eng., Koc Univ., Istanbul
fDate :
June 22 2008-April 25 2008
Abstract :
A novel thermo-mechanical infrared (IR) imaging array with integrated diffraction gratings for optical readout was fabricated and tested. Parylene was used as a structural material for its low thermal conductivity and high thermal expansion properties. Tests were performed using an IR blackbody target and first order diffracted light was imaged on a CCD camera to monitor the entire array. Results show that it is possible to achieve Lt100 mK NETD using a 12 bit CCD camera.
Keywords :
CCD image sensors; infrared detectors; infrared imaging; micro-optomechanical devices; thermal conductivity; thermal expansion; integrated diffraction gratings; microoptoelectromechanical system; parylene; thermal conductivity; thermal expansion; thermal imaging camera; thermo-mechanical infrared imaging array; Cameras; Charge coupled devices; Charge-coupled image sensors; Optical arrays; Optical diffraction; Optical imaging; Testing; Thermal conductivity; Thermal expansion; Thermomechanical processes;
Conference_Titel :
Research in Microelectronics and Electronics, 2008. PRIME 2008. Ph.D.
Conference_Location :
Istanbul
Print_ISBN :
978-1-4244-1983-8
Electronic_ISBN :
978-1-4244-1984-5
DOI :
10.1109/RME.2008.4595735
