Mechanical behaviour of membranes´ micromachined sensor under uniform pressure

In this paper the results of calculation of the performances of membrane sensing elements of unconventional shape are represented. The analytical expressions for calculation of a sag, strains, voltages and natural frequency for elastic elements in the shape of a triangular, rhombus, rectangle, hexagon and ellipse are obtained. The parameters describing integrated piezotransducers are calculated depending on a relation of the sizes of a sensing device and crystallographic orientation of its coordinate axes for planes (001), (110), (111). The calculations are conducted for membrane sensing elements containing piezotransducers both with piezoresistive bridge and with quasi-Hall topology of the current spread region