Title :
RF plasma generators in instrument making
Author :
Geller, V.M. ; Khrustalev, V.A. ; Chipurnov, S.A.
Author_Institution :
Novosibirsk State Tech. Univ., Russia
Abstract :
In this paper perspective layouts, regimes and design aspects of RF/microwave plasma generator constructions with large reactors are reviewed; retrospective estimations of instrumental maintenance of the indicated problems are given. The aspects of electrovacuum instrument making are covered basically, and a number of particular conditions are taken into account
Keywords :
cathode-ray tubes; electron tube manufacture; microwave technology; plasma materials processing; plasma production; sputter etching; CRT fabrication; RF plasma generators; electrovacuum instrument making; large reactors; microwave plasma generators; microwave resonant system; plasma etching; Cathode ray tubes; Electromagnetic heating; Inductors; Instruments; Microwave generation; Plasma applications; Plasma diagnostics; Plasma materials processing; Radio frequency; Resonance;
Conference_Titel :
Science and Technology, 1999. KORUS '99. Proceedings. The Third Russian-Korean International Symposium on
Conference_Location :
Novosibirsk
Print_ISBN :
0-7803-5729-9
DOI :
10.1109/KORUS.1999.876260
