Mixed-domain simulation of intermodulation in RF-MEMS capacitive shunt switches

A hierarchical MEMS design library, implemented in SpectreHDL® within the Cadence® simulation framework is applied to the study of distortion phenomena in RF-MEMS capacitive shunt switches. Two-tone mixed-domain transient simulation of the non-actuated switch, operated at high-power, directly shows, for the first time, self-biasing modulation at the tones spacing frequency. Adjacent-channel intermodulation products are observed and quantified, proving that the adopted mixed-domain simulation approach is the key tool for addressing system-level specifications in RF-MEMS design for wireless applications.