• DocumentCode
    2526455
  • Title

    A study on the dielectric properties of (Sr1-xCax )TiO3 thin film

  • Author

    Kim, J.S. ; Cho, C.N. ; Kim, S.G. ; Shin, C.G. ; Choi, W.S. ; Lee, S.I. ; Kim, C.H. ; Lee, J.U.

  • Author_Institution
    Dept. of Electr. Eng., Kwangwoon Univ., Seoul, South Korea
  • Volume
    2
  • fYear
    2000
  • fDate
    2000
  • Firstpage
    880
  • Abstract
    The (Sr1-xCax)TiO3(SCT) thin films are deposited on Pt-coated electrodes (Pt/TiN/SiO2/Si) using RF magnetron sputtering. The structural and dielectric properties of the SCT thin films were influenced by substitutional contents of Ca. The composition of SCT thin films was close to stoichiometry (1.081~1.117 in A/B ratio). The maximum dielectric constant was obtained for a SCT15 thin film. The dielectric constant changes almost linearly in the temperature range -80~+90[°C]. The temperature properties of the dielectric loss have a stable value. The drastic decrease of dielectric constant and increase of dielectric loss in SCT thin films is observed above 100[kHz]
  • Keywords
    calcium compounds; dielectric losses; dielectric thin films; permittivity; sputter deposition; stoichiometry; strontium compounds; -80 to 90 degC; Pt-TiN-SiO2-Si; Pt-coated electrode; RF magnetron sputtering; SrCaTiO3; dielectric constant; dielectric loss; thin films; Dielectric constant; Dielectric losses; Dielectric thin films; Electrodes; Radio frequency; Semiconductor thin films; Sputtering; Strontium; Temperature distribution; Tin;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Properties and Applications of Dielectric Materials, 2000. Proceedings of the 6th International Conference on
  • Conference_Location
    Xi´an
  • Print_ISBN
    0-7803-5459-1
  • Type

    conf

  • DOI
    10.1109/ICPADM.2000.876369
  • Filename
    876369
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=2526455