Title :
CMOS-based technology for integrated optoelectronics: a modular approach
Author :
Fullin, E. ; Voirin, G. ; Chevroulet, M. ; Lagos, A. ; Moret, J.-M.
Author_Institution :
CSEM, Swiss Center for Electron. & Microtechnol. Inc., Neuchatel, Switzerland
Abstract :
The optoelectronic version of an existing industrial 2 /spl mu/m CMOS process has been developed. With the new technology, single mode strip waveguides, photodiodes and waveguide-to-photodiode couplers have been integrated together with standard CMOS devices. Thanks to a modular approach, the properties of the core process have not been altered. The bandwidth of the basic system, consisting of a curved waveguide coupled to a photodiode and a transimpedance amplifier, is higher than 1.5 MHz at a wavelength of 780 nm. As an example, an unbalanced interferometer with on-chip amplifier has been qualified.<>
Keywords :
CMOS integrated circuits; integrated circuit technology; integrated optoelectronics; light interferometers; optical planar waveguides; photodiodes; 1.5 MHz; 780 nm; CMOS-based technology; OEIC; curved waveguide; integrated optoelectronics; onchip amplifier; photodiodes; single mode strip waveguides; transimpedance amplifier; unbalanced interferometer; waveguide-to-photodiode couplers; CMOS process; CMOS technology; Electromagnetic waveguides; Integrated optoelectronics; Optical interferometry; Optical sensors; Optical signal processing; Optical waveguides; Photodiodes; Silicon;
Conference_Titel :
Electron Devices Meeting, 1994. IEDM '94. Technical Digest., International
Conference_Location :
San Francisco, CA, USA
Print_ISBN :
0-7803-2111-1
DOI :
10.1109/IEDM.1994.383353
