Title :
A micromachined tunable cavity resonator
Author :
Mercier, D. ; Chatras, M. ; Orlianges, J.C. ; Champeaux, C. ; Catherinot, A. ; Blondy, P. ; Cros, D. ; Papapolymerou, J.
Author_Institution :
IRCOM, Limoges, France
Abstract :
This paper focuses on a tunable resonator fabricated using bulk and surface micro-machining techniques. The resonator consists of a silicon micro-machined metalized cavity coupled with MEMS bridge capacitor for tenability purposes. The resonator is excited using coplanar waveguide lines to avoid losses from transitions and facilitate measurements. The unloaded quality factor of the device is about 150 depending on the MEMS varactor position and the simulated tuning range is 0.4 GHz (1.45%) at 27.8 GHz.
Keywords :
Q-factor; cavity resonators; coplanar waveguides; micromachining; micromechanical devices; 0.4 GHz; 27.8 GHz; MEMS bridge capacitor; MEMS varactor position; bulk micromachining technique; coplanar waveguide lines; micromachined tunable cavity resonator; silicon micromachined metalized cavity; surface micromachining techniques; tunable resonator; Bridge circuits; Capacitors; Cavity resonators; Coplanar waveguides; Loss measurement; Micromechanical devices; Q factor; Silicon; Varactors; Waveguide transitions;
Conference_Titel :
Microwave Conference, 2003. 33rd European
Print_ISBN :
1-58053-834-7
DOI :
10.1109/EUMC.2003.1262980
