Title :
Non-linear electromechanical RF model of a MEMS varactor based on veriloga© and lumped-element parasitic network
Author :
Iannacci, Jacopo ; Gaddi, Roberto ; Gnudi, Antonio
Author_Institution :
Bologna Univ., Bologna
Abstract :
In this paper we discuss an approach for the implementation of non-linear electromechanical and RF models of complete RF-MEMS devices within a standard circuit simulator, such as Cadence Spectre or Agilent ADStrade. The intrinsic electromechanical core is based on a structural hierarchical model library implemented in VerilogA language. Moreover, a surrounding lumped element network accounting for the electromagnetic RF behaviour of the MEMS device is extracted from S-parameters measured data. The whole nonlinear model network, composed of the intrinsic VerilogA core plus lumped-element parasitics, can be analysed within a radiofrequency circuit simulator schematic. The model is fully validated against electromechanical and RF static and dynamic measurements, showing good agreement between simulations and experimental results. The presented modeling approach can be the basis for the development of complete RF-MEMS design technology libraries, aiming at optimum hierarchical designs of MEMS-enabled RF circuit blocks.
Keywords :
circuit simulation; lumped parameter networks; microswitches; microwave circuits; varactors; Agilent ADS; Cadence Spectre; MEMS varactor; MEMS-enabled RF circuit; RF-MEMS capacitive switch; S-parameters; VerilogA; lumped-element parasitic network; nonlinear electromechanical RF model; radiofrequency circuit simulator; Circuit simulation; Electromagnetic devices; Electromagnetic measurements; Hardware design languages; Libraries; Microelectromechanical devices; Micromechanical devices; Radio frequency; Radiofrequency microelectromechanical systems; Varactors;
Conference_Titel :
Microwave Integrated Circuit Conference, 2007. EuMIC 2007. European
Conference_Location :
Munich
Print_ISBN :
978-2-87487-002-6
DOI :
10.1109/EMICC.2007.4412770