DocumentCode
2526679
Title
Effects of atmosphere on the reliability of RF-MEMS capacitive switches
Author
Blondy, Pierre ; Crunteanu, Aurelian ; Pothier, Arnaud ; Tristant, Pascal ; Catherinot, Alain ; Champeaux, Corinne
Author_Institution
Univ. de Limoges, Limoges
fYear
2007
fDate
8-10 Oct. 2007
Firstpage
548
Lastpage
550
Abstract
The influence of atmosphere on capacitive RF-MEMS switches is studied. It is shown that ambient atmosphere not only induces an incremental effect on the degradation of MEMS switches but also completely changes the charging mechanism of the dielectrics, directly linked with RF-MEMS reliability behaviour of MEMS switches reliability. Operating RF-MEMS switches in a dry environment changes the mechanism of charging from surface charging to bulk charging.
Keywords
microswitches; reliability; surface charging; RF-MEMS capacitive switches; surface charging; Atmosphere; Dielectrics; Humidity; Microswitches; Packaging; Radiofrequency microelectromechanical systems; Surface charging; Switches; Switching circuits; Voltage;
fLanguage
English
Publisher
ieee
Conference_Titel
Microwave Integrated Circuit Conference, 2007. EuMIC 2007. European
Conference_Location
Munich
Print_ISBN
978-2-87487-002-6
Type
conf
DOI
10.1109/EMICC.2007.4412771
Filename
4412771
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