Title :
Reflectance difference between insulating material and metal electrode of printed circuit affecting the image quality of IC chip automatic inspection
Author :
Chen, L. ; Wang, X. ; Suzuki, M. ; Yoshimura, N.
Author_Institution :
Akita Univ., Japan
Abstract :
The automatic inspection system used in the production of IC chips and printed circuits is employed as a model, and the influence of the reflectance difference between the insulating material and metal electrode surfaces on the image quality of automatic inspection is investigated using a Monte Carlo (MC) method. Theoretical analysis and experimental results reveal that it is possible to examine the reflectance characteristics of the insulating material and printed wire on a substrate in an IC automatic inspection system by the MC method
Keywords :
Monte Carlo methods; automatic optical inspection; integrated circuit manufacture; lighting; printed circuit manufacture; reflectivity; AOI systems; IC automatic inspection system; IC chip production; Monte Carlo method; image quality; insulating material; lighting; metal electrode surfaces; printed circuit production; reflectance characteristics; reflectance difference; Electrodes; Image quality; Inorganic materials; Inspection; Insulation; Integrated circuit modeling; Monte Carlo methods; Printed circuits; Production systems; Reflectivity;
Conference_Titel :
Properties and Applications of Dielectric Materials, 2000. Proceedings of the 6th International Conference on
Conference_Location :
Xi´an
Print_ISBN :
0-7803-5459-1
DOI :
10.1109/ICPADM.2000.876385
