• DocumentCode
    252674
  • Title

    The Nanoworkbench: Automated Nanorobotic system inside of scanning electron or focused ion beam microscopes

  • Author

    Burkart, Ivo ; Klocke, Volker ; Maynicke, Eva

  • fYear
    2014
  • fDate
    13-16 April 2014
  • Firstpage
    89
  • Lastpage
    92
  • Abstract
    Many every day developments would not exist today without preparation, handling and assembly of materials under optical microscopes. There would be no wristwatch, no in vitro fertilization, no mini-gearbox, just to mention a few. These products depend on using toolsets like tweezers, knives, hooks, probes and several different measurement tools in combination with optical microscopes, since a good part of the understanding about material functions and process technologies was developed this way. But many material properties and functionalities also depend on structure dimensions that are smaller than the wavelength of light.
  • Keywords
    beam handling techniques; focused ion beam technology; ion microscopy; optical microscopy; robotic assembly; scanning electron microscopy; Nanoworkbench; automated nanorobotic system; focused ion beam microscopes; material assembly; material handling; material properties; optical microscopes; scanning electron microscopes; Grippers; Nanobioscience; Production systems; Scanning electron microscopy; Software;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Nano/Micro Engineered and Molecular Systems (NEMS), 2014 9th IEEE International Conference on
  • Conference_Location
    Waikiki Beach, HI
  • Type

    conf

  • DOI
    10.1109/NEMS.2014.6908766
  • Filename
    6908766