DocumentCode
252674
Title
The Nanoworkbench: Automated Nanorobotic system inside of scanning electron or focused ion beam microscopes
Author
Burkart, Ivo ; Klocke, Volker ; Maynicke, Eva
fYear
2014
fDate
13-16 April 2014
Firstpage
89
Lastpage
92
Abstract
Many every day developments would not exist today without preparation, handling and assembly of materials under optical microscopes. There would be no wristwatch, no in vitro fertilization, no mini-gearbox, just to mention a few. These products depend on using toolsets like tweezers, knives, hooks, probes and several different measurement tools in combination with optical microscopes, since a good part of the understanding about material functions and process technologies was developed this way. But many material properties and functionalities also depend on structure dimensions that are smaller than the wavelength of light.
Keywords
beam handling techniques; focused ion beam technology; ion microscopy; optical microscopy; robotic assembly; scanning electron microscopy; Nanoworkbench; automated nanorobotic system; focused ion beam microscopes; material assembly; material handling; material properties; optical microscopes; scanning electron microscopes; Grippers; Nanobioscience; Production systems; Scanning electron microscopy; Software;
fLanguage
English
Publisher
ieee
Conference_Titel
Nano/Micro Engineered and Molecular Systems (NEMS), 2014 9th IEEE International Conference on
Conference_Location
Waikiki Beach, HI
Type
conf
DOI
10.1109/NEMS.2014.6908766
Filename
6908766
Link To Document