Title :
Reduction of machining motion error of an aspheric surface coordinate measuring machine by a new error compensation method
Author :
Xiang Wei ; Bing Li ; Lijiao Jia ; Zhuangde Jiang ; Lei Chen
Author_Institution :
State Key Lab. for Manuf. Syst. Eng., Xi´an Jiaotong Univ., Xi´an, China
Abstract :
This paper suggests a new method to reduce the machine motion errors of a 2-dimension aspheric surface measuring. Using the laser interferometer to measure the site error of each point instead of the position error, straightness error and yaw and pitch error. Through error compensation of the new method, the simulation results and verification experiments showed that the site errors agree well within less than 5μm in the whole space. The new mathematical model, the calibration method and the data analysis method are described in detail in the paper.
Keywords :
calibration; coordinate measuring machines; data analysis; error compensation; light interferometers; machining; mathematical analysis; measurement by laser beam; measurement errors; motion measurement; surface topography measurement; aspheric surface coordinate measuring machine; calibration method; data analysis method; error compensation method; laser interferometer; machining motion error reduction; mathematical model; measurement error; pitch error; position error; straightness error; yaw error; Coordinate measuring machines; Error compensation; Machining; Mathematical model; Measurement uncertainty; Optical interferometry; Surface treatment; coordinate measuring machine(CMM); error compensation; error curve surface;
Conference_Titel :
Nano/Micro Engineered and Molecular Systems (NEMS), 2014 9th IEEE International Conference on
Conference_Location :
Waikiki Beach, HI
DOI :
10.1109/NEMS.2014.6908767
