Title :
Laser direct nano-structuring assisted by water droplets
Author :
Chang, Y.J. ; Chang, C. Hwa ; Ho, Chian C. ; Hsu, J.C. ; Kuo, C.L.
Author_Institution :
Dept. of Mech. Eng., Nat. Yunlin Univ. of Sci. & Technol., Yunlin, Taiwan
Abstract :
Nano-structuring using laser direct writing technology has shown a great potential for industrial applications. A novel application of water droplets to this technology is proposed in this paper. With a hydrophobic layer and a controlled substrate temperature, a layer of randomly distributed water droplets with a high contact angle is formed on the substrate. These liquid droplets can be used as lenses to enhance the laser intensity at the bottom of the droplets. As a result, nanoscale holes can be fabricated on the substrate by controlling the laser energy density. We successfully fabricate holes with a diameter of 600nm at a substrate temperature of 12°C and a power density of 1.2×108 mW/cm2 in our experiments.
Keywords :
drops; laser materials processing; nanofabrication; nanostructured materials; surface treatment; water; contact angle; controlled substrate temperature; hole fabrication; hydrophobic layer; industrial applications; laser direct writing technology; laser energy density; laser intensity enhancement; liquid droplet lenses; nanoscale holes; randomly distributed water droplets; size 600 nm; temperature 12 degC; water droplet assisted laser direct nanostructuring; Density measurement; Laser ablation; Laser beams; Power lasers; Power system measurements; Silicon; Substrates;
Conference_Titel :
Nano/Micro Engineered and Molecular Systems (NEMS), 2014 9th IEEE International Conference on
Conference_Location :
Waikiki Beach, HI
DOI :
10.1109/NEMS.2014.6908772
