DocumentCode :
2526866
Title :
A highly testable and diagnosable fabrication process test chip
Author :
Bhavsar, Dilip K. ; Echeruo, Ugonna ; Akeson, David R. ; Bowhill, William J.
Author_Institution :
Alpha Technol. Group, Compaq Comput. Corp., Shrewsbury, MA, USA
fYear :
1998
fDate :
18-23 Oct 1998
Firstpage :
853
Lastpage :
861
Abstract :
We present the concept and prototype of the Logic Test Vehicle (LTV), a novel tool for ramp-up, qualification and monitoring of semiconductor fabrication processes. The LTV overcomes some of the known shortcomings of SRAM test vehicles used today for these purposes. It employs test circuitry which is more complex and more representative of the complexities found on real products yet retains testability and diagnosability, the two most important attributes required of test vehicles
Keywords :
SRAM chips; automatic testing; integrated circuit testing; logic testing; SRAM test vehicles; diagnosable fabrication process; logic test vehicle; monitoring; qualification; ramp-up; semiconductor fabrication processes; test circuitry; testable fabrication process; Circuit testing; Fabrication; Geometry; Libraries; Life testing; Logic arrays; Logic testing; Qualifications; Random access memory; Vehicles;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Test Conference, 1998. Proceedings., International
Conference_Location :
Washington, DC
ISSN :
1089-3539
Print_ISBN :
0-7803-5093-6
Type :
conf
DOI :
10.1109/TEST.1998.743274
Filename :
743274
Link To Document :
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