Design of a digital closed control loop for the sense mode of a mode-matching MEMS vibratory gyroscope

Author

Liu, Y.X. ; Feng, W.L. ; He, C.H. ; Wang, Lingfeng ; Dong, L.G. ; Zhao, Q.C. ; Yang, Z.C. ; Yan, G.Z.

Author_Institution

Nat. Key Lab. of Sci. & Technol. on Micro/Nano Fabrication Inst. of Microelectron., Peking Univ., Beijing, China

fYear

2014

fDate

13-16 April 2014

Firstpage

199

Lastpage

203

Abstract

This paper presents a digital closed loop control method for the sense mode of a mode-matching MEMS vibratory gyroscope. The sense closed loop system reported in our previous work is relatively complex and unreliable due to the existence of notch filter. In this work, a more simple and robust control system is realized with the help of mode-matching control. With a tuning voltage automatically applied on the tuning combs of the gyroscope, a frequency split of less than 0.3 Hz is achieved. Experimental results show that the mode-matched gyroscope achieves a scale factor of 18.5mV/deg/s with a nonlinearity of 0.088% and a bias instability of 2.7deg/h.

Keywords

closed loop systems; control system synthesis; digital control; gyroscopes; micromechanical devices; mode matching; physical instrumentation control; robust control; digital closed loop control design; mode-matching MEMS vibratory gyroscope; mode-matching control; notch filter; robust control system; sense closed loop system; tuning combs; tuning voltage; Bandwidth; Force; Gyroscopes; Micromechanical devices; Resonant frequency; Temperature measurement; Tuning; Closed Loop control; MEMS vibratory gyroscope; Mode-matching; Sense mode;

fLanguage

English

Publisher

ieee

Conference_Titel

Nano/Micro Engineered and Molecular Systems (NEMS), 2014 9th IEEE International Conference on

Conference_Location

Waikiki Beach, HI

Type

conf

DOI

10.1109/NEMS.2014.6908790

Filename

6908790