Title :
Pulse mode actuation-readout system based on MEMS resonator for liquid sensing
Author :
Meng Tang ; Cagliani, Alberto ; Davis, Zachary J. ; Lin He
Author_Institution :
Dept. of Electron. & Inf., Soochow Univ., Suzhou, China
Abstract :
A MEMS (Micro-Electro-Mechanical Systems) bulk disk resonator is applied for mass sensing under its dynamic mode. The classical readout circuitry involves sophisticated feedback loop and feedthrough compensation. We propose a simple straightforward non-loop pulse mode actuation and capacitive readout scheme. In order to verify its feasibility in liquid bio-chemical sensing environment, an experimental measurement is conducted with humidity sensing application. The measured resonant frequency changes 60kHz of 67.7MHz with a humidity change of 0~80%.
Keywords :
chemical sensors; humidity sensors; microactuators; micromechanical resonators; MEMS resonator; bulk disk resonator; capacitive readout scheme; dynamic mode; feedback loop; feedthrough compensation; humidity sensing application; liquid bio-chemical sensing environment; mass sensing; microelectromechanical systems; pulse mode actuation-readout system; readout circuitry; simple straightforward nonloop pulse mode actuation; Frequency measurement; Humidity; Humidity measurement; Micromechanical devices; Resonant frequency; Sensors; Vibrations; humidity sensing; mass sensing; pulse mode; resonant frequency;
Conference_Titel :
Nano/Micro Engineered and Molecular Systems (NEMS), 2014 9th IEEE International Conference on
Conference_Location :
Waikiki Beach, HI
DOI :
10.1109/NEMS.2014.6908794
