DocumentCode
2527989
Title
Surface Characteristics Modification by Plasma Flow
Author
Dobrovol´s´kii, A.M. ; Evsyukov, A.N. ; Goncharov, A.A. ; Kravchuk, R.N. ; Protsenko, I.M. ; Yaroshchuk, O.V.
Author_Institution
Inst. of Phys. of NASU, Kyiv
Volume
2
fYear
2006
fDate
25-29 Sept. 2006
Firstpage
576
Lastpage
579
Abstract
In the modern technologies the various plasma treatment methods are widely used. The essential advantage of these methods are possibility to work with the dielectric and semi-conductor targets. One of possible utilization area of these technologies can be the creation of anisotropy of surface properties of materials. The using of anode layer accelerator allow easy to scale this technology on very large size substrates. We describe here some of the results of experimental investigation of changes of surface characteristics of different materials after a low dose treatment by accelerated plasma. It is shown that little variations of irradiation dose can lead to essential change of surface anisotropy. In part, this can be visualized by the different type of liquid crystals alignment on substrates with different irradiation dose. The treatment in several steps allow to obtain a different alignment of liquid crystal in the one cell
Keywords
dielectric materials; plasma flow; plasma-wall interactions; surface structure; accelerated plasma; anode layer accelerator; irradiation dose; liquid crystal alignment; plasma flow; surface anisotropy; surface characteristics modification; Anisotropic magnetoresistance; Anodes; Crystalline materials; Dielectric materials; Dielectric substrates; Liquid crystals; Plasma accelerators; Plasma materials processing; Plasma properties; Surface treatment;
fLanguage
English
Publisher
ieee
Conference_Titel
Discharges and Electrical Insulation in Vacuum, 2006. ISDEIV '06. International Symposium on
Conference_Location
Matsue
ISSN
1093-2941
Print_ISBN
1-4244-0191-7
Electronic_ISBN
1093-2941
Type
conf
DOI
10.1109/DEIV.2006.357367
Filename
4194948
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