Title :
Fabrication of piezoelectric zinc oxide nanorods by Electrospraying method
Author :
Wang, S.Y. ; Hung, K.H. ; Chen, Yu Christine ; Pan, C.T. ; Yen, C.K. ; Wang, W.C. ; Liu, Z.H.
Author_Institution :
Dept. of Mech. & Electro-Mech. Eng., Nat. Sun Yat-Sen Univ., Kaohsiung, Taiwan
Abstract :
This study mainly used Electrospraying and Taguchi method to investigate the optimum process of piezoelectric Zinc oxide (ZnO) nanorods parameters. Zinc oxide seed layer was electrosprayed on Au/Chromium/Silicon substrates. The electric field is around 660 V/mm. In this study, ZnO was made in an array to characterize. We used X-ray diffraction (XRD), photoluminescence (PL) and field emission scanning electron microscopy (FE-SEM) to characterize the morphology and luminescence of ZnO nanorods. The result showed that with higher and longer of annealing temperature and time. Furthermore, this study was obtained optimum height at 3~5 um of piezoelectric Zinc Oxide nanorods by adopting the process of hydrothermal for 14 hours and with 90 degrees Celsius.
Keywords :
II-VI semiconductors; Taguchi methods; X-ray diffraction; annealing; electrochemistry; field emission electron microscopy; nanofabrication; nanorods; photoluminescence; piezoelectric semiconductors; scanning electron microscopy; semiconductor growth; spray coating techniques; wide band gap semiconductors; zinc compounds; Au-Cr-Si; Au-chromium-silicon substrates; FESEM; Taguchi method; X-ray diffraction; XRD; ZnO; annealing temperature; electrospraying method; field emission scanning electron microscopy; hydrothermal process; morphology; photoluminescence; piezoelectric zinc oxide nanorods; size 3 mum to 5 mum; time 14 h; zinc oxide seed layer; Annealing; Arrays; Crystallization; Substrates; Temperature; Zinc oxide; Electrosparying; Ppizoelectric; Taguchi method; Zinc oxide;
Conference_Titel :
Nano/Micro Engineered and Molecular Systems (NEMS), 2014 9th IEEE International Conference on
Conference_Location :
Waikiki Beach, HI
DOI :
10.1109/NEMS.2014.6908831
