DocumentCode
2528248
Title
Theoretical and experimental studies of micromachined hot-wire anemometers
Author
Fukang Jiang ; Yu-Chong Tai ; Chih-Ming Ho ; Karan, R. ; Garstenauer, M.
Author_Institution
California Inst. of Technol., Pasadena, CA, USA
fYear
1994
fDate
11-14 Dec. 1994
Firstpage
139
Lastpage
142
Abstract
A new type of micromachined and batch-fabricated hot-wire anemometers has been developed. The systematic characterization of these devices, especially of the steady-state characteristics, frequency response, and directional dependence are presented. These micromachined anemometers can perform better than conventional ones because of their extremely small size. It is demonstrated that a 10 /spl mu/m long, 1 /spl mu/m wide, and 0.5 /spl mu/m thick polysilicon hot wire can have a unprecedented bandwidth of 1.4 MHz in constant-temperature mode.<>
Keywords
anemometers; electric sensing devices; frequency response; micromachining; silicon; 1.4 MHz; Si; batch-fabrication; constant-temperature mode; directional dependence; frequency response; micromachined hot-wire anemometers; polysilicon; steady-state characteristics; Assembly; Fluid flow measurement; Frequency response; Mass production; Packaging; Platinum; Prototypes; Silicon; Steady-state; Wire;
fLanguage
English
Publisher
ieee
Conference_Titel
Electron Devices Meeting, 1994. IEDM '94. Technical Digest., International
Conference_Location
San Francisco, CA, USA
ISSN
0163-1918
Print_ISBN
0-7803-2111-1
Type
conf
DOI
10.1109/IEDM.1994.383445
Filename
383445
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