Fabrication of spiral-shaped PVDF cantilever based vibration energy harvester

Author

Wen Liu ; Mengdi Han ; Xuming Sun ; Haixia Zhang

Author_Institution

Nat. Key Lab. of Sci. & Technol. on Micro/Nano Fabrication, Peking Univ., Beijing, China

fYear

2014

fDate

13-16 April 2014

Firstpage

458

Lastpage

461

Abstract

Polyvinylidene fluoride (PVDF) has a strong piezoelectricity. With the piezoelectric coefficient of poled thin films as large as 6-7 pC/N, PVDF is becoming a popular material for the sensors and energy harvesting. However, the fabrication process of PVDF is a big challenge due to the physical and chemical properties of PVDF. In this paper, a spiral-shaped PVDF cantilever is fabricated to harvest vibration energy in the environment. Copper mass and silicon mass are added to the PVDF cantilever to reduce the resonant frequency. Series of MEMS fabrication process are utilized to realize the PVDF piezoelectric energy harvester.

Keywords

cantilevers; energy harvesting; micromechanical devices; piezoelectricity; vibrations; MEMS fabrication; chemical properties; energy harvesting; physical properties; piezoelectric coefficient; piezoelectric energy harvester; piezoelectricity; polyvinylidene fluoride cantilever; sensors; thin films; vibration energy harvester; Copper; Electrodes; Etching; Fabrication; Films; Silicon; PVDF; copper mass; energy harvesting; silicon mass;

fLanguage

English

Publisher

ieee

Conference_Titel

Nano/Micro Engineered and Molecular Systems (NEMS), 2014 9th IEEE International Conference on

Conference_Location

Waikiki Beach, HI

Type

conf

DOI

10.1109/NEMS.2014.6908849

Filename

6908849