Title :
Design of T-shape vector hydrophone based on MEMS
Author :
Guan, Linggang ; Zhang, Guojun ; Xue, Chenyang ; Zhang, Wendong ; Xiong, Jijun ; Xu, Jiao
Author_Institution :
Sci. & Technol. on Electron. Test & Meas. Lab., Taiyuan, China
Abstract :
This paper reports the design and fabrication of T-shape vector hydrophone based on MEMS inspired by fish lateral line. Based on the analysis of mechanical properties of T-beam, the design and fabrication process of microstructure are described in detail, and then the characteristics of the microstructure are analyzed by the ANSYS. The first-order resonance frequency is 1970Hz, and the position of the piezoresistor is away from edges about 120μm. The microstructure is manufactured by means of the silicon-on-insulator (SOI) craft. The test results show that hydrophone´s receiving sensitivity is up to -180dB (0dB = 1V/μPa), displaying a clear directivity pattern in the form of “8” shape.
Keywords :
biological techniques; hydrophones; microfabrication; microsensors; piezoresistive devices; silicon-on-insulator; AN SYS; MEMS; SOI craft; Si; T-shape vector hydrophone design; first-order resonance frequency; fish lateral line; frequency 1970 Hz; mechanical properties; microstructure; piezoresistor; silicon-on-insulator craft; Hair; Marine animals; Micromechanical devices; Microstructure; Resonant frequency; Sensitivity; Sonar equipment; Bionic sensor; MEMS; SOI craft; Vector hydrophone;
Conference_Titel :
Solid-State Sensors, Actuators and Microsystems Conference (TRANSDUCERS), 2011 16th International
Conference_Location :
Beijing
Print_ISBN :
978-1-4577-0157-3
DOI :
10.1109/TRANSDUCERS.2011.5969121
