Title :
Measurement of SAW velocity using impulse system and its application on NDE
Author :
Nomura, Tooru ; Wayashi, M. ; Yasuda, Tsutomu
Author_Institution :
Dept. of Electr. Commun.., Shibaura Inst. of Technol., Tokyo, Japan
Abstract :
Surface acoustic wave (SAW) devices use the characteristics of SAW propagations directly. Therefore, the characteristic SAW propagation on a piezoelectric substrate is very important for such a device. In this paper, a new method for measuring SAW velocity is described. The method uses the spectrum of impulse response of the interdigital transducer (IDT), which depends on the SAW velocity and electrode period. The velocity of the SAW in an isotropic layer on a piezoelectric substrate and single crystal substrate were measured nondestructively using the pulse method
Keywords :
acoustic wave velocity measurement; nondestructive testing; surface acoustic waves; NDE; SAW velocity; impulse response; interdigital transducer; isotropic layer; nondestructive measurement; piezoelectric substrate; pulse method; single crystal substrate; surface acoustic wave device; Acoustic measurements; Acoustic propagation; Acoustic transducers; Acoustic waves; Electrodes; Piezoelectric transducers; Pulse measurements; Surface acoustic wave devices; Surface acoustic waves; Velocity measurement;
Conference_Titel :
Frequency Control Symposium, 1996. 50th., Proceedings of the 1996 IEEE International.
Conference_Location :
Honolulu, HI
Print_ISBN :
0-7803-3309-8
DOI :
10.1109/FREQ.1996.559870
