The application of a new beam-rigid body MEMS gyroscope in the frequency-modulation mode

Author

Lajimi, S.A.M. ; Heppler, G.R. ; Abdel-Rahman, Eihab

Author_Institution

Dept. of Syst. Design Eng., Univ. of Waterloo, Waterloo, ON, Canada

fYear

2014

fDate

13-16 April 2014

Firstpage

586

Lastpage

591

Abstract

For a new type of a MEMS gyroscope made of a cantilever beam and an end-rigid-body, the reduced-order (discretized) model is obtained by using the method of assumed modes. The discretized model´s static behavior is verified by comparing with the stationary partial differential governing equations. The free dynamics of the system are studied under a constant input voltage. The gyroscopic natural and pseudo-natural frequencies of the system are obtained. To operate the gyroscope in the frequency-modulation mode, the input angular rate is computed in analytical and numerical form.

Keywords

beams (structures); cantilevers; frequency modulation; gyroscopes; micromechanical devices; partial differential equations; reduced order systems; MEMS gyroscope; beam-rigid body; cantilever beam; discretized model; end-rigid-body; free dynamics; frequency modulation mode; gyroscopic natural frequency; pseudonatural frequency; reduced-order model; static behavior; stationary partial differential governing equations; Dynamics; Equations; Frequency measurement; Frequency modulation; Gyroscopes; Mathematical model; Resonant frequency;

fLanguage

English

Publisher

ieee

Conference_Titel

Nano/Micro Engineered and Molecular Systems (NEMS), 2014 9th IEEE International Conference on

Conference_Location

Waikiki Beach, HI

Type

conf

DOI

10.1109/NEMS.2014.6908880

Filename

6908880