Title :
Pressure sensor using Nano-opto-mechanical Systems (NOMS)
Author :
Zhao, X. ; Tsai, J.M. ; Cai, H. ; Ji, X.M. ; Zhou, J. ; Bao, M.H. ; Huang, Y.P. ; Kwang, D.L. ; Liu, A.Q.
Author_Institution :
Sch. of Electr. & Electron. Eng., Nanyang Technol. Univ., Singapore, Singapore
Abstract :
This paper presents a pressure sensor array based on optical force using Nano-opto-mechanical Systems (NOMS). It consists of a deformable diaphragm and a waveguide array. When pressure is applied on the diaphragm, the gap between the diaphragm and the waveguide is reduced. The induced optical force deforms the waveguide and change the optical loss. In the experiment, it measures up to 32 dB optical output modulation when the pressure is changed from 0 kPa to 250 kPa. The proposed waveguide pressure sensor array has advantages such as high sensitivity (0.128 dB/kPa) and feasibility of mapping the pressure distributions, which result in potential applications such as microphone acoustics sensors and bio-medical sensors.
Keywords :
micro-optomechanical devices; microsensors; nanoelectromechanical devices; nanophotonics; pressure sensors; NOMS; bio medical sensor; deformable diaphragm; microphone acoustics sensor; nano opto-mechanical system; pressure 0 kPa to 250 kPa; pressure sensor; waveguide array; Force; Optical device fabrication; Optical interferometry; Optical refraction; Optical sensors; Optical variables control; Optical waveguides; Nano-opto-mechanical Systems (NOMS); optical force; waveguide array;
Conference_Titel :
Solid-State Sensors, Actuators and Microsystems Conference (TRANSDUCERS), 2011 16th International
Conference_Location :
Beijing
Print_ISBN :
978-1-4577-0157-3
DOI :
10.1109/TRANSDUCERS.2011.5969164
