DocumentCode
2529336
Title
Microplasma Discharge Using Carbon Nanotubes for Cathode
Author
Zou, Q. ; Ishibashi, T. ; Ohi, H. ; Nakazawa, K. ; Kanakusa, H. ; Hatta, A.
Author_Institution
Dept. of Electron. & Photonic Syst. Eng., Kochi Univ. of Technol.
Volume
2
fYear
2006
fDate
25-29 Sept. 2006
Firstpage
841
Lastpage
844
Abstract
Microplasma has been studied with gaps from 10 to 1000 mum at near atmospheric pressure in a scanning electron microscope (SEM) chamber using CNTs for cathode. The field emission and gas discharge experiments were carried out at the same configuration. It was confirmed that field electron emission effectively provided primary electrons into the gap, which ignited discharge easily. In the case of gas discharge using carbon nanotubes for cathode, the cathode surface was not damaged even if the discharge current was more than 150 mA
Keywords
carbon nanotubes; cathodes; discharges (electric); electron emission; 10 to 1000 micron; carbon nanotubes; cathode; field electron emission; gas discharge; microplasma discharge; scanning electron microscope; Anodes; Carbon nanotubes; Cathodes; Electron emission; Iron; Pollution measurement; Probes; Scanning electron microscopy; Surface discharges; Voltage;
fLanguage
English
Publisher
ieee
Conference_Titel
Discharges and Electrical Insulation in Vacuum, 2006. ISDEIV '06. International Symposium on
Conference_Location
Matsue
ISSN
1093-2941
Print_ISBN
1-4244-0191-7
Electronic_ISBN
1093-2941
Type
conf
DOI
10.1109/DEIV.2006.357434
Filename
4195015
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