DocumentCode
2529343
Title
Theoretical analysis on gyroscopic effect in surface acoustic waves
Author
Wang, Wen ; Liu, Jiuling
Author_Institution
Inst. of Acoust., Chinese Acad. of Sci., Beijing, China
fYear
2011
fDate
5-9 June 2011
Firstpage
1042
Lastpage
1045
Abstract
The rotation of a piezoelectric medium gives rise to a shift of propagation velocity of surface acoustic wave (SAW) due to the Coriolis force, resulting in the frequency shift of the SAW device, and hence, the evaluation of the sensor performance. The phase velocity shift is investigated by applying surface effective permittivity method in the regime of small ratios of the rotation velocity and the frequency of the SAW. The gyroscopic effect for various SAWs propagating along several common piezoelectric substrates as ST-X quartz, YX 128°LiNbO3, and X-112°Y LiTaO3 were studied, and the calculated results indicates that the larger response to external rotation was observed in X-112°Y LiTaO3, which is consistent with the previous reported results. Also, the validity of the theoretical analysis was confirmed by the reported experimental results, it means the surface effective permittivity method is an effective way for gyroscopic effect analysis.
Keywords
acoustic wave propagation; acoustic wave velocity; lithium compounds; permittivity; quartz; surface acoustic wave sensors; LiNbO3; LiTaO3; SAW device; ST-X quartz; SiO2; gyroscopic effect analysis; permittivity method; phase velocity shift; piezoelectric medium substrate; piezoelectric substrates; propagation velocity; sensor performance; surface acoustic wave; theoretical analysis; Substrates; Surface acoustic waves; Coriolis force; Gyroscopic effect; Surface acoustic wave; Surface effective permittivity;
fLanguage
English
Publisher
ieee
Conference_Titel
Solid-State Sensors, Actuators and Microsystems Conference (TRANSDUCERS), 2011 16th International
Conference_Location
Beijing
ISSN
Pending
Print_ISBN
978-1-4577-0157-3
Type
conf
DOI
10.1109/TRANSDUCERS.2011.5969168
Filename
5969168
Link To Document