Fabrication of Novel Graphite Field Emitters and their Application to an Electron Beam Pumped Light Sources

Author

Shiozawa, Kousuke ; Neo, Yoichiro ; Okada, M. ; Kume, Hideyuki ; Matsumoto, T. ; Ikedo, T. ; Takahashi, M. ; Hashiguchi, G. ; Mimura, H.

Author_Institution

Res. Inst. of Electron., Shizuoka Univ., Hamamatsu

Volume

2

fYear

2006

fDate

25-29 Sept. 2006

Firstpage

849

Lastpage

852

Abstract

We have fabricated novel sputter-induced carbon nanoneedle field-emitters and Si electron-transparent films for application to electron-beam-pumped light sources. The sputter-induced carbon nanoneedle field-emitters exhibited a stable electron emission of 10 muA at an average field of 6V/mum. The 1.5mum-thick Si electron-transparent films achieved an electron transmittance of about 60% at an acceleration voltage of 27kV. An electron-beam-pumped light source was successfully demonstrated by the excitation of rare gases such as Ne, Ar, Kr and Xe

Keywords

electron beams; field emission; graphite; silicon; 1.5 micron; Si; Si electron transparent films; electron beam pumped light sources; electron emission; electron transmittance; graphite field emitters; sputter-induced carbon nanoneedle field-emitters; Acceleration; Argon; Carbon dioxide; Electron beams; Electron emission; Fabrication; Gases; Light sources; Semiconductor films; Voltage;

fLanguage

English

Publisher

ieee

Conference_Titel

Discharges and Electrical Insulation in Vacuum, 2006. ISDEIV '06. International Symposium on

Conference_Location

Matsue

ISSN

1093-2941

Print_ISBN

1-4244-0191-7

Electronic_ISBN

1093-2941

Type

conf

DOI

10.1109/DEIV.2006.357436

Filename

4195017