DocumentCode
2529506
Title
A differential difference amplifier with automatic gain selection as readout interface for CMOS stress sensors in orthodontic brackets
Author
Kuhl, M. ; Gieschke, P. ; Paul, O. ; Manoli, Y.
Author_Institution
Dept. of Microsyst. Eng. (IMTEK), Univ. of Freiburg, Freiburg, Germany
fYear
2011
fDate
5-9 June 2011
Firstpage
819
Lastpage
822
Abstract
This paper presents two types of CMOS stress sensors and the associated readout interface. Utilizing a differential difference amplifier (DDA) in combination with a digitally assisted gain selection, the gain is maximized during each readout while the amplified sensor signal is kept within the linear output range of the DDA. The readout consumes 290 μA with a measured resolution of 22 μV at maximum gain. For the presented sensors an in-plane shear stress or differences of normal stresses as low as 24 kPa can be resolved at a full scale signal of 100 MPa, while non-mechanical contributions are suppressed. Sensors and readout are fabricated in a 0.35 μm CMOS process operating at 3.3 V.
Keywords
CMOS integrated circuits; differential amplifiers; microfabrication; readout electronics; sensors; stress measurement; CMOS stress sensors; DDA; automatic gain selection; current 290 muA; differential difference amplifier; in-plane shear stress; nonmechanical contribution; orthodontic brackets; pressure 100 MPa; readout interface; size 0.35 mum; voltage 22 muV; voltage 3.3 V; Intelligent sensors; MOS devices; Magnetic sensors; Mechanical sensors; Semiconductor device measurement; Stress; CMOS MEMS; DDA; sensor readout; smart bracket; stress sensors;
fLanguage
English
Publisher
ieee
Conference_Titel
Solid-State Sensors, Actuators and Microsystems Conference (TRANSDUCERS), 2011 16th International
Conference_Location
Beijing
ISSN
Pending
Print_ISBN
978-1-4577-0157-3
Type
conf
DOI
10.1109/TRANSDUCERS.2011.5969177
Filename
5969177
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