• DocumentCode
    2530199
  • Title

    Ultra-high precision MEMS accelerometer

  • Author

    Dong, Y. ; Zwahlen, P. ; Nguyen, A.M. ; Frosio, R. ; Rudolf, F.

  • Author_Institution
    Colibrys (Switzerland) Ltd., Neuchâtel, Switzerland
  • fYear
    2011
  • fDate
    5-9 June 2011
  • Firstpage
    695
  • Lastpage
    698
  • Abstract
    So far MEMS inertial accelerometers has struggled to reach tactical grade quality only and their bias stability and thermal drift are still obstacles to be overcome for inertial navigation systems. This paper reports on an ultrahigh precision MEMS closed-loop accelerometer recently developed by Colibrys, and the focus is on long term bias stability and thermal drift. The improvement in bias stability comes from MEMS process flow and closed-loop electronics.
  • Keywords
    accelerometers; inertial navigation; microsensors; Colibrys; MEMS process flow; closed-loop electronic; inertial navigation system; long term bias stability; tactical grade quality; thermal drift; ultra-high precision MEMS close-loop inertial accelerometer; Accelerometers; Micromechanical devices; Noise; Silicon; Temperature measurement; Temperature sensors; Thermal stability; Accelerometer; MEMS; inertial navigation system; long term bias stability;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Solid-State Sensors, Actuators and Microsystems Conference (TRANSDUCERS), 2011 16th International
  • Conference_Location
    Beijing
  • ISSN
    Pending
  • Print_ISBN
    978-1-4577-0157-3
  • Type

    conf

  • DOI
    10.1109/TRANSDUCERS.2011.5969218
  • Filename
    5969218
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=2530199