Title :
Improvement in selectivity of NO2 sensors based on WO3 thin films with MnO2 filters deposited by radio frequency sputtering
Author :
Zhang, C. ; Boudiba, A. ; Navio, C. ; Olivier, M. -G ; Snyders, R. ; Debliquy, M.
Author_Institution :
Service de Sci. des Mater., Univ. de Mons, Mons, Belgium
Abstract :
Thin-film WO3 sensor with a MnO2 filter was prepared to reduce interference of O3 for NO2 detection. The multi-films (WO3 film, MnO2 filter and WO3+MnO2 insulting layer) were deposited by radio frequency sputtering. The microstructure and crystalline phase of the films were characterized with SEM and XRD. The sensors were tested for 25-200 ppb O3 and 50-400 ppb NO2 in moist air at temperatures ranging from 150°C to 250°C. The results show that the sensors with thin filters are capable to reduce the interference from O3.
Keywords :
X-ray diffraction; filters; manganese compounds; scanning electron microscopy; sputtering; thin film sensors; MnO2; SEM; XRD; interference reduction; microstructure-crystalline phase; radio frequency sputtering; temperature 150 degC to 250 degC; thin film sensor; thin filters; Films; Gas detectors; Resistance; Sensor phenomena and characterization; Temperature measurement; Temperature sensors; NO2 sensor; O3 filter; manganese oxide; radio frequency sputtering; tungsten oxide;
Conference_Titel :
Solid-State Sensors, Actuators and Microsystems Conference (TRANSDUCERS), 2011 16th International
Conference_Location :
Beijing
Print_ISBN :
978-1-4577-0157-3
DOI :
10.1109/TRANSDUCERS.2011.5969247
