Thin film gas sensor for detection of toxic gases from microbial

Author

Han, Sang-Do ; Sohn, Y. -S

Author_Institution

Energy Conversion & Storage Res. Center, Korea Inst. of Energy Res., Daejeon, South Korea

fYear

2011

fDate

5-9 June 2011

Firstpage

178

Lastpage

181

Abstract

The metal-oxide semiconductor thin film gas sensor with high resistivity based on In₂O₃ has been characterized to detect toxic gases including acetaldehyde which stems from the mold. The sensor device was fabricated by coating of gold (Au) electrode and platinum (Pt) heater on the alumina substrate. In order to enhance the sensitivity the catalyst such as Au and palladium (Pd) was deposited using the thermal evaporator. The responses of the In₂O₃ metal-oxide semiconductor thin films with the Au catalyst show outstanding sensitivity, selectivity, absorption/desorption and linearity to acetaldehyde.

Keywords

MIS devices; catalysts; electrochemical electrodes; gas sensors; gold; indium compounds; palladium; thin film sensors; In₂O₃; absorption-desorption; acetaldehyde; catalyst sensitivity enhancement; metal-oxide semiconductor thin film gas sensor; palladium; thermal evaporator; toxic gas detection; Gas detectors; Gases; Gold; Sensitivity; Temperature sensors; Au catalyst; Sensor; thin film; toxic gas;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid-State Sensors, Actuators and Microsystems Conference (TRANSDUCERS), 2011 16th International

Conference_Location

Beijing

ISSN

Pending

Print_ISBN

978-1-4577-0157-3

Type

conf

DOI

10.1109/TRANSDUCERS.2011.5969248

Filename

5969248