CO2 measurement using an AlN/SI SAW sensor

Author

Fanget, S. ; Grange, H. ; Palancade, F. ; Ganuchaud, G. ; Matheron, M. ; Charlot, S. ; Bordy, T. ; Hoang, T. ; Rey, P. ; Mercier, D. ; Brunet-Manquat, P. ; Robert, P.

Author_Institution

CEA-Leti, Grenoble, France

fYear

2011

fDate

5-9 June 2011

Firstpage

1136

Lastpage

1139

Abstract

Carbon dioxide at concentrations close to 390ppm in atmosphere has to be measured for greenhouse effect and the indoor air quality monitoring. This paper reports for the first time CO₂ measurement ranging from 0 to 3000ppm using a Surface Acoustic Wave sensor (SAW) based on Aluminum Nitride (AlN) technology. The detection is based on gravimetric approach using a 100 nm thick sensitive polymer bearing amino groups: poly(Allylamine) deposited over the SAW. A calculated CO₂ sensitivity of about 15.3 Hz/ppm performed using Finite Element Method is in good agreement with experiment.

Keywords

air pollution; aluminium compounds; carbon compounds; finite element analysis; gas sensors; gravimeters; silicon; surface acoustic wave sensors; AlN-SI; CO₂; SAW sensor; finite element method; gravimetric approach; greenhouse effect; indoor air quality monitoring; poly(Allylamine); polymer bearing amino group; size 100 nm; surface acoustic wave sensor; Analytical models; Atmospheric measurements; Frequency modulation; Particle measurements; Radio frequency; Silicon; Surface acoustic waves; Aluminum Nitride; Carbon dioxide detection; Surface Acoustic Wave sensor; gas sensor; sensitive polymers;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid-State Sensors, Actuators and Microsystems Conference (TRANSDUCERS), 2011 16th International

Conference_Location

Beijing

ISSN

Pending

Print_ISBN

978-1-4577-0157-3

Type

conf

DOI

10.1109/TRANSDUCERS.2011.5969259

Filename

5969259