Title :
Advances in polymer-coated surface acoustic wave gas sensor
Author :
He, Shitang ; Wang, Wen ; Li, Shunzhou ; Liu, Minghua
Author_Institution :
Inst. of Acoust., Chinese Acad. of Sci., Beijing, China
Abstract :
This paper presents some advances in polymer-coated surface acoustic wave (SAW) gas sensor research towards to organophosphorous compounds detection relating to the response mechanism analysis by using some new chemically interactive materials and deposition techniques, and SAW oscillator with superior frequency stability, which are illustrated and discussed in some detail. A 300MHz SAW based delay-line-oscillator coated with PECH(Poly(epichloro-hydrin)) for HD (mustard) detection was performed, in which, a single phase unidirectional transducers (SPUDT) and combed transducer were used to structure the SAW device. The sensor experimental results confirmed the theoretical analysis, high sensitivity and good stability were observed experimentally.
Keywords :
chemical hazards; gas sensors; polymers; surface acoustic wave oscillators; surface acoustic wave sensors; PECH; Poly(epichloro-hydrin); SAW gas sensor; SAW oscillator; chemically interactive material; delay line oscillator; deposition technique; frequency stability; mustard detection; organophosphorous compounds detection; polymer coated surface acoustic wave gas sensor; Attenuation; Chemicals; Coatings; High definition video; Monitoring; Polymers; Surface acoustic waves; PECH; SAW chemical sensor; oscillator; response mechanism; sensitivity;
Conference_Titel :
Solid-State Sensors, Actuators and Microsystems Conference (TRANSDUCERS), 2011 16th International
Conference_Location :
Beijing
Print_ISBN :
978-1-4577-0157-3
DOI :
10.1109/TRANSDUCERS.2011.5969271
