DocumentCode
2531159
Title
Measuring the frequnecy resolution of a multi degree of freedom resonator for mass detection
Author
Moran, K.M. ; Turner, K.L.
Author_Institution
Dept. of Mech. Eng., UCSB, Santa Barbara, CA, USA
fYear
2011
fDate
5-9 June 2011
Firstpage
1128
Lastpage
1131
Abstract
This work focuses on measuring resolution of a coupled, single input single output, multi degree of freedom (MDOF) resonator. This type of device can be operated as a chemical nose. Specifically, we show that the loss in resolution due to coupling does not degrade the signal beyond the usable spectrum. In fact, the sensing cantilevers in this prototype are able to detect as low as 1.47 fg mass sensitivity for a near ambient, table top experiment.
Keywords
cantilevers; chemical sensors; frequency measurement; mass measurement; micromechanical resonators; microsensors; MDOF resonator; MEMS size scale devices; SISO transducer; frequency resolution measurement; mass detection; mass sensor; multidegree of freedom resonator; sensing cantilevers; Couplings; Frequency measurement; Laser beams; Measurement by laser beam; Resonant frequency; Sensitivity; Sensors; Frequency Resolution; MEMS; Mass sensor; Resonator; Single Input Single Output (SISO); chemical nose;
fLanguage
English
Publisher
ieee
Conference_Titel
Solid-State Sensors, Actuators and Microsystems Conference (TRANSDUCERS), 2011 16th International
Conference_Location
Beijing
ISSN
Pending
Print_ISBN
978-1-4577-0157-3
Type
conf
DOI
10.1109/TRANSDUCERS.2011.5969281
Filename
5969281
Link To Document