• DocumentCode
    2531302
  • Title

    A pressure programmable gas chromatography microsystem utilizing motionless Knudsen pump, fiber-integrated optical detector, and silicon micromachined separation column

  • Author

    Liu, Jing ; Gupta, Naveen K. ; Fan, Xudong ; Wise, Kensall D. ; Gianchandani, Yogesh B.

  • Author_Institution
    Eng. Res. Center for Wireless Integrated Microsyst., Univ. of Michigan, Ann Arbor, MI, USA
  • fYear
    2011
  • fDate
    5-9 June 2011
  • Firstpage
    803
  • Lastpage
    806
  • Abstract
    This paper describes a micro gas chromatography (μGC) system that utilizes three miniaturized components. An optical fiber-based detector is used to monitor the elution peaks of different chemical species through a 25 cm long micromachined separation column. A motionless gas pump based on thermal transpiration is used to transport the analytes in the μGC. Simple pressure programming allows rapid analysis (<;5 min) without compromising the resolution of the lighter analytes. For example, the μGC system is operated at a pumping pressure head of 10.5 kPa for 35 sec to separate lighter analytes (pentane, heptane, and octane); the pumping pressure head is then ramped up to 21.6 kPa to allow rapid detection of heavier analytes (decane, and undecane).
  • Keywords
    Knudsen flow; chromatography; fibre optic sensors; microfluidics; micromachining; microsensors; organic compounds; pumps; silicon; Si; analyte transport; elution peak; environmental health monitoring; fiber integrated optical detector; heptane; microgas chromatography system; motionless Knudsen pump; motionless gas pump; octane; optical fiber based detector; pentane; pressure 10.5 kPa; pressure 21.6 kPa; pressure programmable gas chromatography microsystem; silicon micromachined separation column; size 25 cm; thermal transpiration; undecane; Arrays; Gas chromatography; Optical detectors; Optical fiber sensors; Plastics; Programming; Silicon; Environmental health monitoring; Fabry-Pérot optical detector; Knudsen pump; chemical sensing; free-molecular flow regime; optical detector; transitional flow regime;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Solid-State Sensors, Actuators and Microsystems Conference (TRANSDUCERS), 2011 16th International
  • Conference_Location
    Beijing
  • ISSN
    Pending
  • Print_ISBN
    978-1-4577-0157-3
  • Type

    conf

  • DOI
    10.1109/TRANSDUCERS.2011.5969291
  • Filename
    5969291