Title :
Behavior of semiconductor gas sensors with sol-gel sensing layer
Author :
Halek, Grzegorz ; Stoga, Dawid ; Teterycz, Helena
Author_Institution :
Fac. of Microsyst. Electron. & Photonics, Wroclaw Univ. of Technol., Wroclaw, Poland
Abstract :
In this paper a sol-gel technique and SnO2 sensing layers prepared with this technique are presented. The tin dioxide sol was prepared of SnCl4 and deposited with spin coating method. The developed sensing layers have nanocrystalline structure and show excellent substrates adhesion. The gas sensor sensitivity strongly depends on thickness of deposited material. Probably, the large sensitivity of the semiconductor gas sensors is the result of conduction model of flat bands.
Keywords :
adhesion; gas sensors; nanosensors; nanostructured materials; semiconductor materials; sol-gel processing; spin coating; tin compounds; SnO2; flat band conduction model; gas sensor sensitivity; nanocrystalline structure; semiconductor gas sensors; sol-gel technique; spin coating method; substrates adhesion; tin dioxide sol sensing layers; Gas detectors;
Conference_Titel :
Photonics and Microsystems, 2008 International Students and Young Scientists Workshop -
Conference_Location :
Wroclaw
Print_ISBN :
978-1-4244-4971-2
Electronic_ISBN :
978-1-4244-2555-6
DOI :
10.1109/STYSW.2008.5164132
