• DocumentCode
    2531606
  • Title

    Behavior of semiconductor gas sensors with sol-gel sensing layer

  • Author

    Halek, Grzegorz ; Stoga, Dawid ; Teterycz, Helena

  • Author_Institution
    Fac. of Microsyst. Electron. & Photonics, Wroclaw Univ. of Technol., Wroclaw, Poland
  • fYear
    2008
  • fDate
    20-22 June 2008
  • Firstpage
    12
  • Lastpage
    14
  • Abstract
    In this paper a sol-gel technique and SnO2 sensing layers prepared with this technique are presented. The tin dioxide sol was prepared of SnCl4 and deposited with spin coating method. The developed sensing layers have nanocrystalline structure and show excellent substrates adhesion. The gas sensor sensitivity strongly depends on thickness of deposited material. Probably, the large sensitivity of the semiconductor gas sensors is the result of conduction model of flat bands.
  • Keywords
    adhesion; gas sensors; nanosensors; nanostructured materials; semiconductor materials; sol-gel processing; spin coating; tin compounds; SnO2; flat band conduction model; gas sensor sensitivity; nanocrystalline structure; semiconductor gas sensors; sol-gel technique; spin coating method; substrates adhesion; tin dioxide sol sensing layers; Gas detectors;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Photonics and Microsystems, 2008 International Students and Young Scientists Workshop -
  • Conference_Location
    Wroclaw
  • Print_ISBN
    978-1-4244-4971-2
  • Electronic_ISBN
    978-1-4244-2555-6
  • Type

    conf

  • DOI
    10.1109/STYSW.2008.5164132
  • Filename
    5164132
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=2531606