DocumentCode :
2531628
Title :
Carbon nanotube based high current transistors
Author :
Seidel, R. ; Graham, A.P. ; Unger, E. ; Duesberg, G.S. ; Liebau, M. ; Steinhoegl, W. ; Pamler, W. ; Kreupl, F.
Author_Institution :
Corp. Res., Infineon Technol. AG, Munich, Germany
fYear :
2004
fDate :
16-19 Aug. 2004
Firstpage :
7
Lastpage :
9
Abstract :
We have constructed planar field-effect-transistors capable of switching currents of up to several milliamperes based on randomly placed single-walled carbon nanotubes (SWCNTs). The SWCNTs were grown using a chemical vapor deposition (CVD) process from a nickel based catalyst at a temperature of 650°C. Transistor source and drain contacts were defined using electron-beam lithography. The use of several hundreds of SWCNTs in parallel facilitates the incorporation of randomly deposited tubes into practical transistors that can be used as normal switches or, when appropriately chemically functionalized, as gas or biomolecule detectors.
Keywords :
carbon nanotubes; chemical vapour deposition; electron beam lithography; field effect transistors; nanotube devices; 650 degC; CVD; biomolecule detector; carbon nanotube based high current transistors; chemical vapor deposition process; drain contact; electron-beam lithography; gas detector; nickel based catalyst; planar field-effect-transistors; single-walled carbon nanotubes; source contact; switching current; Carbon nanotubes; Chemical technology; Chemical vapor deposition; Lithography; Nickel; Semiconductivity; Silicon; Substrates; Temperature; Voltage;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Nanotechnology, 2004. 4th IEEE Conference on
Print_ISBN :
0-7803-8536-5
Type :
conf
DOI :
10.1109/NANO.2004.1392231
Filename :
1392231
Link To Document :
بازگشت