Inductively coupled wirebonded microcoils for wireless on-chip NMR

Author

Badilita, V. ; Fassbender, B. ; Gruschke, O. ; Kratt, K. ; Meier, R. ; Sakellariou, D. ; Korvink, J.G. ; Wallrabe, U.

Author_Institution

Dept. of Microsyst. Eng. - IMTEK, Univ. of Freiburg, Freiburg, Germany

fYear

2011

fDate

5-9 June 2011

Firstpage

2798

Lastpage

2800

Abstract

We report for the first time single-chip MEMS-integration of a resonant LC-circuit for wireless magic angle coil spinning (MACS) NMR. The chip consists of a wirebonded 3D microcoil, an interdigitated capacitor and a sample container. The LC-circuit resonates at 700MHz for ¹H spectroscopy in 16.4T magnetic field. The microcoil is inductively coupled with the probe-coil of the spectrometer. We prove the high sensitivity of the setup by detecting the NMR signal from 0.3nl H₂O in a mixture with deuterium oxide (0.1% H₂O: 99.9% D₂O) with an SNR=8.5 in one scan.

Keywords

NMR spectroscopy; bioMEMS; capacitors; deuterium compounds; magic angle spinning; deuterium oxide; frequency 700 MHz; inductively coupled wirebonded 3D microcoils; interdigitated capacitor; magnetic flux density 16.4 T; resonant LC-circuit; single-chip MEMS-integration; wireless magic angle coil spinning; wireless on-chip NMR; Capacitors; Electrodes; Nuclear magnetic resonance; System-on-a-chip; Water; Wireless communication; Wireless sensor networks; inductive coupling; microcoils; on-chip NMR;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid-State Sensors, Actuators and Microsystems Conference (TRANSDUCERS), 2011 16th International

Conference_Location

Beijing

ISSN

Pending

Print_ISBN

978-1-4577-0157-3

Type

conf

DOI

10.1109/TRANSDUCERS.2011.5969321

Filename

5969321