Title :
Stress sensitivity coefficients: a general approach for bulk, Rayleigh and surface transverse waves
Author :
Bigler, E. ; Ballandras, S.
Author_Institution :
CNRS, Univ. de Franche-Comte, Besancon, France
Abstract :
An analytical approach of intrinsic stress sensitivity coefficients is presented. The model is first applied to investigate the sensitivity of bulk and Rayleigh wave devices to mechanical stresses. A comparison is made with Finite Element Analysis (FEA) methods and it is shown that the stress sensitivity coefficients approach can predict the existence of stress compensated crystal cuts and correctly model the force frequency effect of a circular disk with a dramatic reduction of computation time. The model is extended to the case of Surface Transverse Waves (STW) propagating on singly-rotated quartz plates. It is shown that by a highly interesting coincidence planar isotropic stress compensation occurs for STW devices now built and tested (AT-plates). The case of planar stress sensitivity of STW devices on thin plates is considered
Keywords :
Rayleigh waves; acoustic resonators; bulk acoustic wave devices; crystal oscillators; quartz; stress effects; surface acoustic wave devices; AT-plates; SiO2; acoustic resonators; bulk Rayleigh waves; crystal oscillators; force frequency effect; mechanical stresses; planar isotropic stress compensation; singly-rotated quartz plates; stress compensated crystal cuts; stress sensitivity coefficients; surface transverse waves; Acceleration; Acoustic devices; Finite element methods; Frequency; Oscillators; Packaging; Shape; Stress; Surface acoustic waves; Surface waves;
Conference_Titel :
Frequency Control Symposium, 1996. 50th., Proceedings of the 1996 IEEE International.
Conference_Location :
Honolulu, HI
Print_ISBN :
0-7803-3309-8
DOI :
10.1109/FREQ.1996.559891