DocumentCode
2532476
Title
Next generation microbolometers for high resolution remote sensing
Author
Phong, L. Ngo ; Lee, J. ; Zheng, W. ; Pope, T.D. ; Alain, C. ; Elias, S. ; Jerominek, H.
Author_Institution
Canadian Space Agency, Ottawa, Ont., Canada
fYear
2005
fDate
24-27 July 2005
Firstpage
197
Lastpage
198
Abstract
We describe our recent work on improving the time constant and NETD of uncooled microbolometer detector. Such improvement would enable infrared remote sensing with a spatial resolution better than 150 m from low earth orbits. Radiometric simulation of the new microbolometer designs shows that reduction of time constant by a factor of 3 and reduction of NETD by a factor of 1.5 can be achieved. Linear arrays of 512×3 microbolometers embedding the new designs have been fabricated for experimental validation.
Keywords
bolometers; geophysical equipment; infrared detectors; radiometry; remote sensing; NETD; earth orbits; high resolution remote sensing; infrared remote sensing; radiometric simulation; spatial resolution; time constant; uncooled microbolometer detector; Bridge circuits; Detectors; Low earth orbit satellites; Micromechanical devices; Remote monitoring; Remote sensing; Smart pixels; Space technology; Spatial resolution; Thermal conductivity;
fLanguage
English
Publisher
ieee
Conference_Titel
MEMS, NANO and Smart Systems, 2005. Proceedings. 2005 International Conference on
Print_ISBN
0-7695-2398-6
Type
conf
DOI
10.1109/ICMENS.2005.84
Filename
1540815
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