• DocumentCode
    2532476
  • Title

    Next generation microbolometers for high resolution remote sensing

  • Author

    Phong, L. Ngo ; Lee, J. ; Zheng, W. ; Pope, T.D. ; Alain, C. ; Elias, S. ; Jerominek, H.

  • Author_Institution
    Canadian Space Agency, Ottawa, Ont., Canada
  • fYear
    2005
  • fDate
    24-27 July 2005
  • Firstpage
    197
  • Lastpage
    198
  • Abstract
    We describe our recent work on improving the time constant and NETD of uncooled microbolometer detector. Such improvement would enable infrared remote sensing with a spatial resolution better than 150 m from low earth orbits. Radiometric simulation of the new microbolometer designs shows that reduction of time constant by a factor of 3 and reduction of NETD by a factor of 1.5 can be achieved. Linear arrays of 512×3 microbolometers embedding the new designs have been fabricated for experimental validation.
  • Keywords
    bolometers; geophysical equipment; infrared detectors; radiometry; remote sensing; NETD; earth orbits; high resolution remote sensing; infrared remote sensing; radiometric simulation; spatial resolution; time constant; uncooled microbolometer detector; Bridge circuits; Detectors; Low earth orbit satellites; Micromechanical devices; Remote monitoring; Remote sensing; Smart pixels; Space technology; Spatial resolution; Thermal conductivity;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    MEMS, NANO and Smart Systems, 2005. Proceedings. 2005 International Conference on
  • Print_ISBN
    0-7695-2398-6
  • Type

    conf

  • DOI
    10.1109/ICMENS.2005.84
  • Filename
    1540815