Ultra-small site temperature sensing by carbon nanotube thermal probes

Author

Arai, Fumihito ; NG, Chinaik ; Liu, Pou ; Dong, Lixin ; Imaizumi, Yoshiaki ; Maeda, Kazutoshi ; Maruyama, Hisataka ; Ichikawa, Akihiko ; Fukuda, Toshio

Author_Institution

Dept. of Micro Syst. Eng., Nagoya Univ., Japan

fYear

2004

fDate

16-19 Aug. 2004

Firstpage

146

Lastpage

148

Abstract

We have assembled thermal probes with single carbon nanotubes (CNTs) for sensing temperature distribution in local area. The temperature coefficient of resistance of the thermal probes shows the positive characteristics. The feasibility of the CNT thermal probes for scanning local area temperature is investigated in nanometer order. We have implemented the assembled CNT thermal probes for temperature measurement and calibration of CNT nanoheater, and demonstrated them to be novel temperature sensors.

Keywords

carbon nanotubes; electrical resistivity; nanotube devices; temperature distribution; temperature measurement; temperature sensors; C; CNT thermal probes; carbon nanotube nanoheater; carbon nanotube thermal probes; nanometer order; scanning local area temperature; temperature distribution; temperature measurement; temperature resistance coefficient; temperature sensors; ultra small site temperature sensing; Assembly systems; Atomic force microscopy; Carbon nanotubes; Electrodes; Probes; Scanning electron microscopy; Temperature measurement; Temperature sensors; Thermal engineering; Thermal resistance;

fLanguage

English

Publisher

ieee

Conference_Titel

Nanotechnology, 2004. 4th IEEE Conference on

Print_ISBN

0-7803-8536-5

Type

conf

DOI

10.1109/NANO.2004.1392278

Filename

1392278