Title :
Estimation of the transfer function of a microcantilever used in atomic-force microscopy
Author :
Stark, M. ; Guckenberger, R. ; Stemmer, A. ; Stark, R.W.
Author_Institution :
Max-Planck-Inst. fur Biochemie, Martinsried, Germany
Abstract :
Calibration of the force sensor is a crucial issue in atomic force microscopy. To this end, usually only the spring constant is determined. However, for dynamic AFM applications it is essential to know the entire transfer function of the cantilever. We determine the empirical transfer function estimate of a micromechanical force sensor used in atomic-force microscopy.
Keywords :
atomic force microscopy; calibration; force sensors; microsensors; transfer functions; atomic-force microscopy; calibration; dynamic AFM; empirical transfer function; microcantilever; micromechanical force sensor; spring constant; Adhesives; Atomic force microscopy; Calibration; Diodes; Force measurement; Force sensors; Instruments; Silicon; Springs; Transfer functions;
Conference_Titel :
Nanotechnology, 2004. 4th IEEE Conference on
Print_ISBN :
0-7803-8536-5
DOI :
10.1109/NANO.2004.1392281
